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LDNMOS device for an ESD protection structure

机译:用于ESD保护结构的LDNMOS器件

摘要

The present invention provides a LDNMOS device for an ESD protection structure, by means of disposing a metal portion above the isolation portion and overlapping thereof, so as to protect the internal device from ESD more completely, comprising: a substrate; an ILD; a deep N-well region; a P-body region; a doped region, the doped region defines a diffusion area on the top thereof; a Poly gate electrode; an isolation structure disposed between the Poly gate electrode and the doped region; a contact portion connecting to the diffusion area of the doped region; and a metal portion disposed above the doped region, connecting to the contact portion. Wherein there is an overlap between the isolation structure and the metal portion, the direction of the overlap is parallel to the direction of channel length.
机译:本发明提供了一种用于ESD保护结构的LDNMOS器件,其通过将金属部分布置在隔离部分上方并与其重叠,从而更彻底地保护内部设备免受ESD影响。一个ILD; N井深区; P体区域;掺杂区,所述掺杂区在其顶部限定扩散区;多晶硅栅电极;隔离结构设置在多晶硅栅电极和掺杂区之间。接触部分连接到掺杂区的扩散区域;金属部分设置在掺杂区域上方,并连接到接触部分。其中,在隔离结构与金属部分之间存在重叠,该重叠的方向平行于沟道长度的方向。

著录项

  • 公开/公告号US9230954B1

    专利类型

  • 公开/公告日2016-01-05

    原文格式PDF

  • 申请/专利权人 UNITED MICROELECTRONICS CORPORATION;

    申请/专利号US201514716925

  • 发明设计人 CHI-HONG WU;

    申请日2015-05-20

  • 分类号H01L23/62;H01L27/02;H01L29/78;H01L29/06;H01L29/10;

  • 国家 US

  • 入库时间 2022-08-21 14:27:43

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