ETCHING SOLUTION MANAGING APPARATUS, DISSOLVED METAL CONCENTRATION MEASURING APPARATUS AND DISSOLVED METAL CONCENTRATION MEASURING METHOD

摘要

Provided are a dissolved metal concentration measurement apparatus and a dissolved metal concentration measurement method, and an etching solution management apparatus monitoring dissolved metal concentration with component concentration of an etching solution, automatically supplying a supplement solution to constantly maintain the component concentration, and separating and recovering dissolved metal. The present invention comprises; a first physical property value measurement means measuring a first physical property value related to acid concentration of the etching solution; a second physical property value measurement means measuring a second physical property value related to the dissolved metal concentration; a transfer liquid of the supplement solution control means controlling a transfer liquid of the supplement solution supplied based on a correlation between the acid concentration and the first physical property value and a measurement result of the first physical property value; and a dissolved metal recovery removing means recovering and removing the dissolved metal based on the correlation between the dissolved metal concentration and the second physical property value and the measurement value of the second physical property value.