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Process for the growth of low dislocation density GaN
Process for the growth of low dislocation density GaN
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机译:低位错密度GaN的生长工艺
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摘要
High quality free standing GaN is obtained using a new modification of the Epitaxial Lateral Overgrowth technology in which 3D islands or features are created only by tuning the growth parameters. Smoothing these islands (2D growth) is achieved thereafter by setting growth conditions producing enhanced growth. The repetition of 3D-2D growth results in multiple bending of the threading dislocations thus producing thick layers or free standing GaN with threading discloation density below 10 6 cm -2 .
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机译:使用外延横向过度生长技术的新改进方法可获得高质量的自支撑GaN,其中仅通过调整生长参数即可创建3D岛或特征。此后,通过设置产生增强的生长的生长条件来实现对这些岛的平滑处理(二维生长)。 3D-2D生长的重复导致螺纹位错多次弯曲,从而产生厚层或自支撑GaN,其螺纹错位密度低于10 6 cm -2。
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