THIN FILM MANUFACTURING METHOD, THIN FILM MANUFACTURING APPARATUS, PHOTOELECTRIC CONVERSION ELEMENT MANUFACTURING METHOD, LOGIC CIRCUIT MANUFACTURING METHOD, LIGHT-EMITTING ELEMENT MANUFACTURING METHOD, AND LIGHT CONTROL ELEMENT MANUFACTURING METHOD

摘要

[Problem] To provide a thin film manufacturing method, a thin film manufacturing apparatus, a photoelectric conversion element manufacturing method, a logic circuit manufacturing method, a light-emitting element manufacturing method, and a light control element manufacturing method with which layer number control and heterogeneous lamination film formation are possible. [Solution] This thin film manufacturing method: brings an electrically conductive object on which a film is to be formed into contact with a first terminal and a second terminal and applies a voltage across the first terminal and the second terminal to heat a first region, which is the region of the object on which a film is to be formed between the first terminal and the second terminal; and forms a thin film in the first region by supplying a film-forming feedstock to the first region and controlling the reaction time so that a thin film with the intended number of layers is formed.