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Semiconductor Manufacturing Yield Prediction System and Method based on Machine Learning

机译:基于机器学习的半导体制造良率预测系统和方法

摘要

A machine learning based semiconductor manufacturing yield prediction system and method are provided. The result prediction method according to the embodiment of the present invention classifies different types of data according to types and inputs them to different neural network models to learn neural network models, To predict the resultant value. Thus, different neural network models can be applied according to the type of data, and accurate result values can be predicted by securing a neural network model having a structure suited to the characteristics of data.
机译:提供了一种基于机器学习的半导体制造成品率预测系统和方法。根据本发明实施例的结果预测方法根据类型对不同类型的数据进行分类,并将它们输入到不同的神经网络模型中以学习神经网络模型,以预测结果值。因此,可以根据数据的类型应用不同的神经网络模型,并且可以通过确保具有适合于数据特征的结构的神经网络模型来预测准确的结果值。

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