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MACHINE LEARNING-BASED SEMICONDUCTOR MANUFACTURING YIELD PREDICTION SYSTEM AND METHOD
MACHINE LEARNING-BASED SEMICONDUCTOR MANUFACTURING YIELD PREDICTION SYSTEM AND METHOD
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机译:基于机器学习的半导体制造产量预测系统和方法
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摘要
Provided is a machine learning-based semiconductor manufacturing yield prediction system and method. A result prediction method according to an embodiment of the present invention comprises: learning different neural network models by classifying different types of data according to their types and respectively inputting the classified different types of data to the different neural network models; and predicting result values by classifying input data according to their types and respectively inputting the classified input data to different neural network models. Therefore, it is possible to apply different neural network models to respective data according to their types, thereby ensuring a neural network model having a structure appropriate for the characteristics of each type of data and thus accurately predicting a result value.
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