METHOD FOR MANUFACTURING HIGH-REFLECTION MIRROR OF POLYCRYSTAL-BASED ALUMINUM NITRIDE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a high-reflection mirror of polycrystal-based aluminum nitride that meets the demand for a light emission module mirror with a high power, the mirror reflecting waves including ultraviolet rays, visible rays, and infrared rays.;SOLUTION: The method for manufacturing includes: the step (A) of converting an aluminum target, nitride, and argon into plasma, using a magnetron sputtering facility providing a polycrystal-based aluminum nitride substrate with a polished surface, reacting the plasm with a surface of the substrate, generating a thin film of aluminum nitride, and filling a void made of a surface void defect in the substrate; the step (B) of reducing the thickness of the surface of the thin film and polishing the substrate to planarize the substrate; the step (C) of forming an aluminum coating layer on the thin film by using a vacuum coating facility; the step (D) of forming a silver coating layer on the aluminum coating layer by using a vacuum coating facility; and the step (E) of forming a surface protective film on the silver coating layer.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT