ALUMINUM NITRIDE POWDER MANUFACTURING METHOD, ALUMINUM NITRIDE PRECURSOR, AND MANUFACTURING METHOD FOR ALUMINUM NITRIDE SINTERED BODY USING ALUMINUM NITRIDE POWDER

摘要

By means of a step S1 wherein an aluminum-containing material that contains a hydrolytic aluminum compound, a carbon-containing material, and water are mixed to form a raw material mixture and a step S2 wherein a precursor contained in the raw material mixture mixed in step S1 undergoes carbonization and nitrogenation reduction processes, a refined powder of aluminum nitride is extracted. Thus, the manufacturing cost for an aluminum nitride product can be controlled and the aluminum nitride product can be provided with plasma resistance.