ALUMINUM NITRIDE POWDER, ALUMINUM NITRIDE-BASED CERAMIC SINTERED BODY, MEMBER FOR SEMICONDUCTOR MANUFACTURING DEVICE, ALUMINUM NITRIDE LUMINESCENT MATERIAL, AND METHOD OF MANUFACTURING ALUMINUM NITRIDE POWDER

摘要

100 g of aluminum nitride (AlN) powder and 2.0 g of aluminum oxide (Al₂O₃) powder were placed in graphite crucible. Thereafter, the entire crucible was treated with heat by keeping it in a nitrogen atmosphere at a temperature of 2200° C. and a pressure of 1.5 kgf/cm² for 2 hours. In this manner, aluminum nitride powder was prepared.