Safety plate of clean room for manufacturing semiconductor and clean room using the same

摘要

The present invention relates to a safety plate of a semiconductor manufacturing clean room and a clean room manufactured by Semiconductor Manufacturing Co., A safety plate of a semiconductor manufacturing clean room according to the present invention is a safety plate installed in a semiconductor manufacturing clean room provided with a plurality of columns erected in a vertical direction and provided with a plurality of horizontal beams interconnecting adjacent columns in the horizontal and vertical directions, And a plurality of through holes formed in the inside of the safety plate and communicating with the air through the through holes. The semiconductor manufacturing clean room is a semiconductor manufacturing clean room equipped with a safety plate. The clean room is divided into a plurality of layers by horizontal beams installed horizontally on the column. The air passage area of the safety plate installed in each layer is constant Lt; / RTI According to such a configuration, there is an effect of preventing the safety of the operator at the time of equipment work in the clean room for manufacturing the semiconductor and preventing the defective semiconductor product from being contaminated.