Safety plate of clean room for manufacturing semiconductor and clean room using the same

摘要

The present invention relates to a safety plate of a semiconductor-manufacturing clean room, which is installed for the safety of a work during a facility work in a clean room where a semiconductor is manufactured, and to a semiconductor-manufacturing clean room installed with a safety plate. The safety plate installed in a semiconductor-manufacturing clean room in which a plurality of pillars are erected in a vertical direction and a plurality of horizontal beams for connecting a gap between adjacent pillars in horizontal and vertical directions, comprises: a corner part for surrounding pillars; a side part placed in a longitudinal direction of horizontal beams; and a plurality of through holes formed inside a safety plate to allow air to pass therethrough. The semiconductor-manufacturing clean room, which is a semiconductor-manufacturing clean room where the safety plate is installed, is divided into a plurality of layers by the horizontal beams installed in the pillars in a horizontal direction, wherein an air passing area of the safety plate installed in each of the layers is installed to be reduced at a predetermined ratio in accordance with an air flow direction. Accordingly, a safety of a worker is ensured during a facility work in a semiconductor-manufacturing clean room, and a defect of a semiconductor product due to contaminants is prevented.