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IMPROVED APPLICATION OF MODULATING SUPPLIES IN A PLASMA PROCESSING SYSTEM
IMPROVED APPLICATION OF MODULATING SUPPLIES IN A PLASMA PROCESSING SYSTEM
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机译:等离子体处理系统中调制用品的改进应用
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摘要
Plasma processing systems and methods are disclosed. The method may include modulating plasma properties with a modulating supply where the modulation of the plasma properties has a repetition period, T. A waveform with the repetition period T is characterized to produce a waveform dataset, which includes at least one of information about the modulation of the plasma or a desired waveform of a piece of equipment connected to the plasma processing system. The waveform dataset is sent to at least one piece of equipment connected to the plasma system and a synchronization signal is sent with a synchronization signal repetition period that is an integer multiple of T to the at least one piece of equipment connected to the plasma system.
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