Development of a quasi-direct temperature control system of modulated induction thermal plasmas for advanced materials processing

摘要

A new modulated induction thermal plasma system, called a feedback control type of modulated induction thermal plasma system, was developed for quasi-direct control of thermal plasma temperature for advanced materials processing. The system is based on the arbitrary-waveform modulation induction thermal plasma system developed previously in our work, and a real-time spectroscopic observation system. The Ar excitation temperature was measured in real time using a spectroscopic observation technique. Its time evolution was controlled to trace externally given waveform periodical signals between 6000 and 8000K such as rectangular, triangular and sawtooth waveforms. In addition, the developed system was confirmed to adopt an automatic power injection control, synchronized with gas injection as a disturbance.