Substrate transport method, substrate transport apparatus including the substrate transport method, and substrate processing apparatus with substrate transport apparatus including the substrate transport apparatus and substrate processing apparatus

摘要

PROBLEM TO BE SOLVED: To provide a substrate transfer device at low cost without making a large change in layout and the like, and to easily and surely perform additional installation on an existing substrate processing device. A substrate transfer device (2) in which storage devices (3, 4) before and after processing are arranged at both ends in order to load and input a pre-processing substrate (9) into a substrate processing device (11) and to discharge and carry out a processed substrate (10). Are developed in parallel to the processing portions 13a to 13f of the processing tables 12 arranged in parallel, the substrate loading and unloading operations before and after the processing can be performed by opening the upper part of the storage device to simplify the structure. In addition to being inexpensive, it is possible to prevent failures, and the loading and unloading of substrates before and after processing is concentrated in one place, reducing the number of work steps for the entire device, while also supplying and collecting substrates in each substrate storage device. Since it is done on the side to save space, the installation and work space is minimized, and the addition of a board transfer device and the installation of a new device as a whole can be done easily and securely at low cost without major changes in layout. You can do it. [Selection diagram] Figure 1