Apparatus for transporting a substrate, processing apparatus having a receiving plate adapted to a substrate carrier of such apparatus, and method for processing a substrate using the apparatus for transporting the substrate, and processing system

摘要

The present invention includes a device for transporting a substrate into or from a processing apparatus, a method for processing the substrate, and a moving device for moving the apparatus for transporting the substrate. Regarding the processing system. In this case, the device for transporting the substrate includes a substrate carrier having a horizontally extending holding surface and one or more gripping arms. The first surface of the holding surface facing the substrate is formed flat and uniformly, the shape of the first surface substantially corresponds to the shape of the substrate, and the area of the first surface is the said. It is almost equal to the area of the substrate. In this case, the substrate is held on the holding surface on the rear surface of the substrate only by its gravity. The processing device has a storage plate. The substrate is held on the accommodating plate during processing. In this case, the accommodating plate has a recess in the first surface, and the recess is suitable for accommodating the substrate carrier during processing of the substrate.