FLATNESS DETECTION METHOD, FLATNESS DETECTION DEVICE AND FLATNESS DETECTION PROGRAM

摘要

To provide a flatness detection method capable of enhancing inspection accuracy of a component by correctly detecting inclination of a component regardless of a measurement condition.SOLUTION: A flatness detection method for detecting flatness of a component on the basis of imaging data obtained by imaging an electronic component 5 by a 3D camera 2, comprises: a reference point information acquisition step (step S601) for acquiring position information and height information related to a plurality of reference points m of the electronic component 5; a virtual plane generation step (step S605) for generating a virtual plane on the basis of the position information and height information on selected at least three selection points out of the plurality of reference points; a virtual plane determination step for determining whether the virtual plane is a valid plane or an invalid plane on the basis of height information with the virtual plane of the reference point m except for a selection portion on the reference point m, as reference; and a flatness detection step (step S608) for detecting flatness of a component with the valid plane as reference.SELECTED DRAWING: Figure 6