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Coating material used to reduce roughness of resist pattern, and method of manufacturing resist pattern with reduced roughness
Coating material used to reduce roughness of resist pattern, and method of manufacturing resist pattern with reduced roughness
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机译:用于减少抗蚀剂图案的粗糙度的涂料和制造具有减小的粗糙度的抗蚀剂图案的方法
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摘要
A coating agent capable of favorably reducing the roughness of a resist pattern, and a method for forming a resist pattern in which roughness is reduced. The method includes coating the resist pattern with the coating agent. The coating agent is a composition including a resin, an amine compound, and a solvent, the amine compound having an aliphatic hydrocarbon group having 8 to 20 carbon atoms and having 1 or more unsaturated double bond and a group having a specific amount of ethylene oxide and/or propylene oxide added thereto.
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