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METHODS FOR SOLVING EPITAXIAL GROWTH LOADING EFFECT AT DIFFERENT PATTERN DENSITY REGIONS
METHODS FOR SOLVING EPITAXIAL GROWTH LOADING EFFECT AT DIFFERENT PATTERN DENSITY REGIONS
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机译:解决不同图案密度区域的表观生长负荷效应的方法
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摘要
A method for reducing an epitaxial growth loading effect in a patterned device includes forming a first trench and a second trench in a substrate and in a first insulating layer over the substrate to form a low pattern density region and a high pattern density region. The first trench has a larger cross-sectional area than the second trench. The method further includes isolating the first trench from the second trench by using a first mask. The method further include disposing a second insulating layer in the first trench. The method further includes removing a portion of the first mask in order to expose the second trench. The method further includes growing an epitaxial layer in the second trench.
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