CMP VALVE MODULE CONTROLLING POSITIVE PRESSURE AND NEGATIVE PRESSURE AND WAFER CARRIER APPARATUS FOR CMP PROCESS OF SEMICONDUCTOR WAFER OR GLASS USING THE SAME

摘要

According to one embodiment of the invention, the valve module for controlling the positive pressure and negative pressure, the other end of the positive pressure source input tube to which the positive pressure source is input to one end connects one end of the positive pressure source output tube outputs the positive pressure source, A first valve configured to communicate or block the positive pressure source input tube and the positive pressure source output tube according to a control signal; The other end of the sound pressure source input tube to which the sound pressure source is first input and the sound pressure source are connected to one end of the sound pressure source output tube communicating with the other end of the positive pressure source output tube, and according to the second control signal and the positive pressure source input tube A second valve capable of communicating or blocking the positive pressure source output tube; And a control board electrically connected to the first valve and the second valve and transmitting the first control signal and the second control signal to the first valve and the second valve, respectively.