Microelectromechanical System Pressure Sensor for Projectile Applications

摘要

A miniaturized high pressure sensor for cannon-launched munitions was fabricated, based on microelectromechanical system (MEMS) technology. It uses a 0.5 microns thin film of lead zirconate titanate (PZT) material for producing an electrical charge that is directly proportional to the pressure. The sensor was mounted on a customized stainless steel housing, placed into a high pressure vessel, and tested to a maximum pressure of 40,000 psi. The shape and configuration of the platinum (Pt)/PZT/Pt layered structure has been redesigned to reduce the complexity of wire interconnections and to increase the charge output of the device.