Design of electron energy analyzers for electron impact studies

摘要

The design and construction of an electron energy analyzer for the study of electron impact processes in atoms,molecules and solids is described.The analyzer incorporates a 180° hemispherical deflector and five-element entrance optics.Focusing characteristics and angular behavior of the analyzer have been investigated by using the electron-ray tracing simulation program,SIMION.The entrance lens system to the hemispherical deflector has been designed to have high collection efficiency for low-energy electrons.The fringing field correction has been done by tilting the input beam angle outward for real aperture configuration.