CHARGING PARTICLE FILTER METHOD, ENERGY FILTER DEVICE, ANALYZER HAVING ENERGY FILTER DEVICE, ELECTRON IMPACT IONIZATION SOURCE AND ANALYZER HAVING ELECTRON IMPACT IONIZATION SOURCE

摘要

PURPOSE: To solve an overlapping problem of both of electrostatic fields when particle beam is passed through first electrostatic field and deflected within a first space area and particle beam is passed through second electrostatic field and returned in a second space area connected with a beam propagating direction on the front side and/or the rear side of the first space area with respect to filtering of charging particle of particle beam according to kinetic energy, and improve filter characteristics in an energy filter device performing a filter processing for charging particle of particle beam by reflection of a cylindrical capacitor according to kinetic energy with respect to this energy filter device. ;CONSTITUTION: In an energy filter processing, ion enters further separate electrostatic deflection field between electrodes 7a', 3b' after ion is passed through first electrostatic field between electrodes 3a', 3b' and deflected, next, ion is passed through space 5 where electric field does not exist and contituously, ion passes through a shield 11. A beam entrance axis AE and a beam exit axis AA are aligned each other and are offset for a center axis A'Z of a cylindrical external electrode 7a.;COPYRIGHT: (C)1993,JPO