Precision enhancement in boundary element methods with application to electron optics

摘要

A hybrid approach is presented for obtaining electric potentials for use in electron optics modeling. An initial solution from the boundary element method (BEM) is used to derive the bounding potential of a cylindrical subdomain subsequently used in a Fourier series solution. The approach combines the inherent precision of this analytic solution with the flexibility of BEM to describe practical, non-idealized systems of electrodes. The resulting lens field in the Fourier series subdomain is of higher precision, thereby allowing smaller errors in subsequent calculations of electron ray paths. The effects of aberrations are thus easier to observe in tracing non-paraxial rays. Example ray-traces through a simple, known einzel lens are given as validation of this approach.