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Plateholder design for deposition of uniform diamond coatings on WC-Co substrates by microwave plasma CVD for efficient turning application

机译:用微波等离子体CVD沉积均匀金刚石涂层沉积的板载设计,用于高效转动应用

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摘要

Polycrystalline diamond coatings have been grown on cemented carbide WC-6% Co substrates with different aspect ratios by microwave plasma CVD in CH4/H-2 gas mixtures. Special plateholder with holes for group growth has been used to protect the edges of the substrates from non-uniform heating due to the plasma edge effect. The difference in heights Delta h of the substrates and plateholder, and its influence on the diamond film mean grain size, growth rate, phase composition and stress was investigated. Diamond growth rate of 0.3-1 mu m/h and compressive stress of 2.2-2.5 GPa, respectively were determined in the optimal Delta h region. The substrate temperature range of 740-760 degrees C, within which uniform diamond films are produced with good adhesion, is determined. The diamond-coated samples produced at optimized process conditions exhibited a reduction of cutting force and wear resistance by a factor of two, and increase of cutting path length up to 8150 m or by 4.3 times upon turning A390 Al-Si alloy as compared to performance of uncoated tools.
机译:通过CH 4 / H-2气体混合物中的微波等离子体CVD在水泥碳化物WC-6%CO衬底上生长了多晶金刚石涂层。由于等离子体边缘效应,已经使用具有组增长的孔的特殊弹性符,用于保护基板的边缘免受均匀的加热。研究了衬底和面板的高度δH的差异,以及对金刚石薄膜平均晶粒尺寸,生长速率,相组成和应力的影响。在最佳δH地区中,分别测定了0.3-10m / h的金刚石生长速率,并且分别测定2.2-2.5GPa的压缩应力。确定740-760℃的衬底温度范围内,确定具有良好粘合的均匀金刚石膜。在优化的工艺条件下产生的金刚石涂层样品表现出切割力和耐磨性的减少两倍,并且与性能相比,在转动A390 Al-Si合金的情况下,切割路径长度长达8150μm或4.3倍。未涂层的工具。

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