EBOOK PREVIEW STEM-IN-SEM IMAGING TECHNIQUES FOR MICROELECTRONICS FAILURE ANALYSIS

摘要

Scanning electron microscopes (SEMs) and solidstate transmission electron detectors are widely available and generally easy to use, making the collection of imaging techniques referred to as scanning transmission electron microscopy in a scanning electron microscope (STEM-in-SEM) more accessible today than ever before. These techniques are well suited to a host of applications including nanoparticle metrology, grain texture studies, defect analyses, thickness measurements, and for imaging materials susceptible to knock-on damage, to name a few. This article describes an ebook titled STEM-in-SEM: Introduction to Scanning Transmission Electron Microscopy for Microelectronics Failure Analysis, intended as an introductory tutorial for those with little to no transmission imaging experience, and as a source of ideas for those looking to expand the transmission imaging and diffraction capabilities of their existing SEM.