Microcantilevers are popular elements of micro-electromechanical systems (MEMS) utilized in actuation, sensing, and switching. The most useful for MEMS are systems integrating actuation and sensing elements, which are of great importance for portable devices. One of the potential solutions in this case is the use of magnetic forces to actuate micromechanical devices. In this regard, the most straightforward solutions use materials exhibiting a magnetoelectric effect. However, scientists from Yale University have proposed a cantilever design free of the magnetoelectric effect, but built of piezoresistive material.
展开▼