Effect of chamber pressure on defect generation and their influence on corrosion and tribological properties of HIPIMS deposited CrN/NbN coatings

摘要

It has been reported that compared to state-of-the-art technologies, High Power Impulse Magnetron Sputtering produces very dense and droplet free coatings due to the high plasma density and ionisation rate. However, thorough investigation of the coating morphology by scanning electron microscopy, optical microscopy and other surface analysis methods revealed the existence of various types of coating defects.