Flexible capacitive pressure sensor with sensitivity and linear measuring range enhanced based on porous composite of carbon conductive paste and polydimethylsiloxane

摘要

In recent years, the development of electronic skin and smart wearable body sensors has put forward high requirements for flexible pressure sensors with high sensitivity and large linear measuring range. However, it turns out to be difficult to increase both of them simultaneously. In this paper, a flexible capacitive pressure sensor based on a porous carbon conductive paste-polydimethylsiloxane composite is reported, the sensitivity and the linear measuring range of which were developed using multiple methods including adjusting the stiffness of the dielectric layer material, fabricating a microstructure and increasing the dielectric permittivity of the dielectric layer. The capacitive pressure sensor reported here has a relatively high sensitivity of 1.1 kPa(-1) and a large linear measuring range of 10 kPa, making the product of the sensitivity and linear measuring range 11, which is higher than that of the most reported capacitive pressure sensors to our best knowledge. The sensor has a detection of limit of 4 Pa, response time of 60 ms and great stability. Some potential applications of the sensor were demonstrated, such as arterial pulse wave measuring and breath measuring, which shows it as a promising candidate for wearable biomedical devices. In addition, a pressure sensor array based on the material was also fabricated and it could identify objects in the shape of different letters clearly, which shows promising application in future electronic skins.