Elimination of high transient currents and electrode damage during electroformation of TiO_2-based resistive switching devices

摘要

Transient currents associated with electroforming TiO_2-based resistive switching devices were measured using three distinct circuits designed to limit them, and they were correlated with physical changes in the top electrode using scanning electron microscopy. A transient current more than 10 times greater than expected was observed when only using the source meter to limit the current via the compliance set point. The large excursion arose from equipment delays and resulted in significant physical changes to the top electrode. An external resistor was used to decrease the excess transient current value to nearly zero, as long as parasitic capacitive discharges were also suppressed. Simultaneously, the physical changes to the top electrode were completely suppressed, indicating physical damage was related to Joule heating from the excess forming currents. The switching characteristics of all devices were similar, implying damage during electroformation of functional switches can be avoided by device/circuit design.