White-light interferometry on rough surfaces--measurement uncertainty caused by noise

摘要

White-light interferometry on rough surfaces is an optical method for the measurement of the geometrical form of objects. The longitudinal coordinate of the measured surface is obtained from the measured interferogram by means of an evaluation method. However, the longitudinal coordinate cannot be determined completely accurately because the interferogram is affected by noise. We calculate the lower limit of the longitudinal measurement uncertainty caused by noise by use of the Cramer-Rao inequality. Additionally, we calculate the lower limit of the longitudinal measurement uncertainty caused by shot noise only.