Role of energetic plasma in pulsed laser deposition of epitaxial manganite films

摘要

Epitaxial La_(0.7)Sr_(0.3)MnO-3 thin films have been grown on LaAlO_3(001) substrates by pulsed laser deposition under different target-plume-substrate configurations. Outgrowths of various shape and size from some of the manganite films are observed. When the substrate is placed within the visible laser-produced energetic plasma plume, the deposited films are outgrowth-free and exhibit good crystallinity and high electrical conductivity. The formation mechanisms and control measures of the outgrowths in pulsed laser deposited manganite films are discussed.