Development in laser micro-machining techniques

摘要

Two techniques are described which further extend the scope of laser micro-processing systems used in industrial applications. One techniques, synchronized overlay scanning, uses a mask projection concept and is used with excimer lasers to micro-machine multidimensional structures into materials. The other technique, sync scon, is used with galvanometer-based scanner systems and provides an attractive alternative to a mask projection approach in many applications. Both techniques are reviewed in detail and manufacturing applications where they are applicable are introduced.