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首页> 外文期刊>Journal of Electronic Materials >Joining of Broken Multiwalled Carbon Nanotubes Using an Electron Beam-Induced Deposition (EBID) Technique
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Joining of Broken Multiwalled Carbon Nanotubes Using an Electron Beam-Induced Deposition (EBID) Technique

机译:使用电子束诱导沉积(EBID)技术连接破裂的多壁碳纳米管

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摘要

In the present work, joining of broken multiwalled carbon nanotubes (MWCNTs) via an electron beam-induced deposition technique is discussed. Current-induced breakdown caused by Joule heating was achieved by applying an appropriate sweep voltage. Scanning electron microscopy images indicated physical joining of broken tubes. To confirm electrical joining of the tubes, current-voltage measurements of the same tube were carried out before and after joining. The current-voltage characteristics remained ohmic after joining of the broken tube. Furthermore, it was found that deposited platinum (Pt) forms ohmic contacts with different shells of MWCNTs after joining, whereas tungsten (W) does not. This approach provides a significant tool for repairing CNTs in interconnect technologies and assembly of three-dimensional (3D) nanostructures.
机译:在本工作中,讨论了通过电子束诱导沉积技术连接破裂的多壁碳纳米管(MWCNT)。通过施加适当的扫描电压,可以实现由焦耳加热引起的电流感应击穿。扫描电子显微镜图像表明管的物理连接。为了确定管的电连接,在连接之前和之后对同一管进行电流-电压测量。断开的管子接合后,电流-电压特性保持欧姆性。此外,发现在连接后,沉积的铂(Pt)与MWCNT的不同壳形成欧姆接触,而钨(W)则不。这种方法为修复互连技术中的CNT和组装三维(3D)纳米结构提供了重要工具。

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