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Determination of Ultra Light Weight Masses Using AFM and FIB Technology

机译:使用AFM和FIB技术测定超轻质量

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Atomic Force Microscopy (AFM) has evolved as a powerful tool to resolve topographic information of specimens at the nano-scale level. The operating principle of an AFM makes use of the signal detected from the cantilever tip, which may either be a direct measure of the deflection of a laser beam or changes in the frequency of vibration when it interacts with the specimen. The use of the AFM cantilever to measure ultra-light weight masses using a Focused Ion Beam (FIB) deposition technology is demonstrated in this paper. The FIB deposited tungsten was found to contain a significant concentration of gallium from the process. The position of the deposit on the cantilever beam is crucial and is shown to alter significantly the spring constant k and the effective mass of the beam. To illustrate the potential of the technique, a sample of albumin was measured.
机译:原子力显微镜(AFM)已经发展成为一种强大的工具,可以在纳米级解析标本的地形信息。 AFM的工作原理利用从悬臂尖端检测到的信号,该信号既可以直接测量激光束的偏转,也可以直接测量与样品相互作用时的振动频率。本文演示了使用AFM悬臂梁通过聚焦离子束(FIB)沉积技术测量超轻质量。从该工艺中发现,FIB沉积的钨中含有大量的镓。悬臂梁上沉积物的位置至关重要,并且显示出它会显着改变弹簧常数k和梁的有效质量。为了说明该技术的潜力,测量了白蛋白样品。

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