X-ray tube spectral measurement method for quantitative analysis of X-ray fluorescence analysis

摘要

Lα and Lβ X-ray fluorescence spectra of a lead metallic sheet were measured using an energy dispersive X-ray spectrometer by changing the X-ray tube voltage and the material of the primary filter. The Lα to Lβ intensity ratio changed from Lα:Lβ = 3:1 at 15 kV to Lα: Lβ = 1: 1 at 50 kV depending on the X-ray tube voltage and the filter. The scattered X-ray spectra of an acrylic slab instead of the sample in the sample holder were measured by changing the applied voltage and the material of the primary filter. The calculated values of the Pb Lα/Lβ intensity ratio of the metallic sheet using the Shiraiwa-Fujino formula by inserting the scattered X-ray spectra of an acrylic plate as incident X-ray spectra and the fundamental parameters taken from the Elam database were in good agreement with the experimental ones. We conclude that we can obtain an incident X-ray spectrum approximately by measuring the scattered X-ray spectrum without measuring the direct incident beam.