Surface Reaction of a Low-Flux Atomic Oxygen Beam with a Spin-coated polyimide Film: Synergetic Effect of Atomic Oxygen and Ultraviolet Exposures

摘要

In-situ erosion rate measurement, residual gas analysis and surface characterization of polyimide films exposed to an energetic atomic oxygen beam were studied. The polyimide films were formed on quartz crystals in order to measure the mass loss rate with a quartz crystal microbalance during atomic oxygen beam exposure. The simultaneous exposure of a 5eV atomic oxygen beam and ultraviolet light provided a good correlation with The flight data regarding the reaction efficiency of Kapton-H.