Electrical circuit modeling of surface structures for X-ray photoelectron spectroscopic measurements

摘要

We model the X-ray photoelectron spectrometer and the sample with lumped electrical circuit elements, and simulate various types of conditions using a widely used computer program (PSpice) and compare the results with experimental measurements. By using the electrical model simulations, the surface voltage and the spectrum can be estimated under various types of external voltage stimuli, and the zero potential condition can be predicted accurately for obtaining a truly uncharged spectrum. Additionally, effects of several charging mechanisms (taking place during XPS measurements) on the surface potential could easily be assessed. Finally, the model enables us to find electrical properties, like resistance and capacitance of surface structures, under X-ray and low-energy electron exposure.