Microcrystalline Silicon Materials and Solar Cells Prepared by VHF-PECVD

摘要

A series of samples deposited by VHF — PECVD at different pressures were studied. The measurement results of photosensitivity (photo conductivity/dark conductivity) and activation energy indicated near the same rule with the change of the pressure. The results measured by Raman scattering spectra, X—ray diffraction and FTIR all proved the evident crystallization of the materials. Treating the p/i interface by hydrogen has a great improving effect on the performance of the microcrystalline silicon (μc—Si) p—i—n solar cells if the treatment time was appropriate. An efficiency of 4. 24% for μc—Si p—i—n solar cells deposited by VHF-PECVD was firstly obtained.