Influence of substrate temperature on the shape of GaAs nanowires grown by Au-assisted MOVPE

摘要

GaAs nanowires (NWs) are grown on the GaAs(111)B substrates by the Au-assisted metal-organic vapor phase epitaxy (MOVPE). The NW shape is found to be strongly dependent on the substrate temperature during the growth. With increase in the growth temperature, the NW shape modifies from prismatic to conical. The observed temperature behavior is studied within the frame of a theoretical model. It is shown that the key process responsible for the lateral growth is the decomposition of MOVPE precursors at the NW sidewalls and the substrate. Theoretical results are in a good agreement with experimental findings and can be used for the numerical estimates of some important growth parameters as well as for the controlled fabrication of NWs with the desired shape.