Fabrication of Embedded Microstructures Via Lamination of Thick Gel-Casted Ceramic Layers

摘要

This article describes a new approach to fabricate various embedded ceramic microstructures. Design geometries of the microstructures are replicated onto a soft reusable polydimethylsiloxane (PDMS) mold. Rapid consolidation of ceramic suspension on the molds using gel-casting technique produces structured ceramic layers. 85% aqueous glycerol solution has been identified as suitable adhesive agent to laminate the ceramic layers. Capability of the approach in fabricating embedded microstructures of 3-dimensional and aspect ratio as high as 20 and 50 has been demonstrated. Ceramic microthruster and Y-shaped microfluidic reactor are fabricated using this new approach to show its potential to construct various ceramic microdevices.