Multilayer sputtering of SmFe/C(Al) plus appropriate thermal processing has been used to fabricate SmFeC thin films with Al substitution for Fe. It was found that the SmFeAlC thin films exhibited exceptionally high coercivities. A coercivity of 28 kOe was realized for the thin film with structure of Ta(1000 /spl Aring/)/[SmFe(40 /spl Aring/)/C(Al)(5 /spl Aring/)]/spl times/50/Ta(200 /spl Aring/) with subsequent annealing at 650/spl deg/C.
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