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Experimental Approach for the Uncertainty Assessment of 3D Complex Geometry Dimensional Measurements Using Computed Tomography at the mm and Sub-mm Scales

机译:在毫米和亚毫米尺度上使用计算机断层扫描进行3D复杂几何尺寸测量不确定度评估的实验方法

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摘要

The dimensional verification of miniaturized components with 3D complex geometries is particularly challenging. Computed Tomography (CT) can represent a suitable alternative solution to micro metrology tools based on optical and tactile techniques. However, the establishment of CT systems’ traceability when measuring 3D complex geometries is still an open issue. In this work, an alternative method for the measurement uncertainty assessment of 3D complex geometries by using CT is presented. The method is based on the micro-CT system Maximum Permissible Error (MPE) estimation, determined experimentally by using several calibrated reference artefacts. The main advantage of the presented method is that a previous calibration of the component by a more accurate Coordinate Measuring System (CMS) is not needed. In fact, such CMS would still hold all the typical limitations of optical and tactile techniques, particularly when measuring miniaturized components with complex 3D geometries and their inability to measure inner parts. To validate the presented method, the most accepted standard currently available for CT sensors, the Verein Deutscher Ingenieure/Verband Deutscher Elektrotechniker (VDI/VDE) guideline 2630-2.1 is applied. Considering the high number of influence factors in CT and their impact on the measuring result, two different techniques for surface extraction are also considered to obtain a realistic determination of the influence of data processing on uncertainty. The uncertainty assessment of a workpiece used for micro mechanical material testing is firstly used to confirm the method, due to its feasible calibration by an optical CMS. Secondly, the measurement of a miniaturized dental file with 3D complex geometry is carried out. The estimated uncertainties are eventually compared with the component’s calibration and the micro manufacturing tolerances to demonstrate the suitability of the presented CT calibration procedure. The 2U/T ratios resulting from the validation workpiece are, respectively, 0.27 (VDI) and 0.35 (MPE), by assuring tolerances in the range of ± 20–30 µm. For the dental file, the EN < 1 value analysis is favorable in the majority of the cases (70.4%) and 2U/T is equal to 0.31 for sub-mm measurands (L < 1 mm and tolerance intervals of ± 40–80 µm).
机译:具有3D复杂几何形状的微型零件的尺寸验证特别具有挑战性。计算机断层扫描(CT)可以代表基于光学和触觉技术的微型计量工具的合适替代解决方案。但是,在测量3D复杂几何形状时建立CT系统的可追溯性仍然是一个未解决的问题。在这项工作中,提出了一种使用CT测量3D复杂几何形状的测量不确定度的替代方法。该方法基于微型CT系统的最大允许误差(MPE)估算值,该估算值是通过使用多个校准参考伪像通过实验确定的。所提出的方法的主要优点是不需要通过更精确的坐标测量系统(CMS)进行组件的先前校准。实际上,这种CMS仍将保留光学和触觉技术的所有典型限制,尤其是在测量具有复杂3D几何形状的微型组件并且无法测量内部零件时。为了验证所提出的方法,采用了适用于CT传感器的最广泛接受的标准,即Verein Deutscher Ingenieure / Verband Deutscher Elektrotechniker(VDI / VDE)准则2630-2.1。考虑到CT中大量的影响因素及其对测量结果的影响,还考虑了两种不同的表面提取技术来确定数据处理对不确定性的影响。由于可以通过光学CMS进行校准,因此首先使用用于微机械材料测试的工件的不确定性评估来确认该方法。其次,对具有3D复杂几何形状的小型牙科锉进行测量。最终,将估计的不确定性与组件的校准和微制造公差进行比较,以证明所提出的CT校准程序的适用性。通过确保公差在±20–30 µm范围内,验证工件产生的2U / T比分别为0.27(VDI)和0.35(MPE)。对于牙锉,在大多数情况下(70.4%),EN <1值分析是有利的,对于亚毫米级被测物(L <1毫米,公差间隔为±40–80 µm),2U / T等于0.31 )。

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