一种新型三维敏感效应电容式SO_2气体传感器设计

摘要

传统气体传感器只能以简单一维扩散方式对气体响应,扩散机理是建立在表面效应基础上的.提出了一种新型电容式SO_2气体传感器.该传感器敏感结构由离散的微型圆柱体单元三维式扩散模型组成,模型上表面和侧面同时接触被测气体,扩大了与被测气体的接触面积.根据气敏薄膜的扩散响应理论,对传感器的响应时间作出分析,并与梳状电容式气体传感器特性相比较,说明新型传感器具有响应时间更短的优点.%The response mechanism of traditional gas sensor is based on surface effect by one-dimensional diffusion. A new capacitive gas sensor for SO_2 is put forward. The structure is made up of cylinder model with three-dimensional diffusion, which upper and side surfaces can meet the gas at the same time to enlarge the area with gas. According to the theory of film diffusion, the response time of gas sensor is analyzed and compared with traditional sensor,and the new gas sensor has less response time.