射频电感耦合等离子体在横向磁场中扩散的研究

摘要

Influence of the transverse magnetic field provided by the external electromagnet on the electron temperature and ion density in the process of radio frequency inductively coupled plasma (ICP) was investigated by using the Langmuir probe which can move axially. The experimental data show that electron temperature dropped rapidly along the axial direction in expansion region in the presence of transverse magnetic field in comparison with non-magnetic field plasma case. In addition, the transverse magnetic field was found to filter the electrons.%通过轴向移动朗缪尔探针,考察了外置电磁铁提供的横向磁场对射频感应耦合等离子体(ICP)延轴向扩散过程中的电子温度、离子密度的影响.实验数据表明,与无磁场条件下的结果相比,横向磁场的加入使得扩散区内的电子温度沿轴向迅速下降,研究了横向磁场对电子的过滤作用.