新型基于离子注入技术的用于微池芯片的微加热器

摘要

A new microheater embedded in silicon substrate was designed to reduce the power consumption of micro chamber polymerase chain reaction (PCR) chip.The microheater was comprised of heating resistors which were strip-shaped in one axis and fabricated by ion implantation technology.The thermal cycling characteristics of the microheater were studied by using the developed thermal cycling control system,including power consumption,temperature rising speed under different powers,and the effects of sample on temperature and power consumption.The experimental results show that the average temperature rising speed can reach 4.7 ℃/s under the heating power of 1.6 W,and the power consumption at 90 ℃ is only about 0.67 W.Finally,the thermal cycling profile was achieved.Therefore,the microheater based on ion implantation technology can effectively reduce power consumption and well meet the requirements of micro chamber PCR chip.%为了降低微型聚合酶链式反应(PCR)芯片的功耗,设计了一种嵌入硅基内部的微加热器.该加热器由采用离子注入技术制作的加热电阻并行排列构成.利用设计的热循环控制系统,对微加热器进行了热循环特性研究,包括功耗、不同加热功率下的温升速率以及样液对芯片温度及功耗的影响.实验结果表明,当加热功率为1.6 W时平均温升速率可达4.7 ℃/s,90 ℃时芯片功耗仅为0.67 W.最后获得了PCR循环试验曲线.因此,该加热器可以有效降低芯片的功耗,更好地满足微型PCR芯片的要求.