一种新型的电离式MEMS气体传感器

摘要

实现了一种新型的电离式MEMS气体传感器,即线性阻抗电离式MEMS气体传感器.该传感器创新地采用了电导率而不是常用的击穿电压来检测不同的气体成分,这样可以避免高电压对器件的影响,提高器件工作状态的可重复性和稳定性.该器件在低压条件下不同气体组分中进行气体放电实验,测出了不同的伏安特性曲线和电导率值,从而证实了该器件的气体传感特性.%A novel ionization gas sensor,linear resistivity ionization MEMS gas senor,is presented.This MEMS gas sensor differs from the traditional ionization gas sensor,and does not use the breakdown current to fingerprint gas components,but the conductivity of different gases.This can effectively avoid to damage the electrode structures due to the high applied voltage.This gas sensor has good repeatability and stability.In the low-voltage condition,this gas sensor presented different volt-ampere characteristic curves and conductivities of different gas components,so the gas sensing characteristic of this device was proved.The linear characteristic of this gas sensor is also presented.