首页> 外文会议>Symposium on Thin-Films - Stresses and Mechanical properties Vii, held December 1-5, 1997, Boston, Massachusetts, U.S.A. >Mechanical and tribological properties of ZrC/VC alloy films deposited by sputtering and pulsed laser deposition
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Mechanical and tribological properties of ZrC/VC alloy films deposited by sputtering and pulsed laser deposition

机译:溅射和脉冲激光沉积ZrC / VC合金膜的力学和摩擦学性能。

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摘要

A study has been conducted on ZrC/VC alloy thin films prepared by both pulsed laser deposition (PLD) and RF magnetron sputtering. The phase formation, wear properties, and hardness of these thin films were examined. An alloy target comprised of 36
机译:已经对通过脉冲激光沉积(PLD)和射频磁控溅射制备的ZrC / VC合金薄膜进行了研究。检查了这些薄膜的相形成,磨损性能和硬度。由36个合金组成的靶材

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