The Surface Morphology and Nanoscale Electrical Conductivity Studies of the Chemical Etching and Laser Annealing Processed Indium-Tin-Oxide films

摘要

The surface morphology and surface conductivity of the chemical etching and excimer laser ablation processed Indium-Tin-Oxide films have been studied by the atomic force microscopy (AFM) and the current sensing atomic force microscopy (CSAFM). AFM and CSAFM image observations show that chemical etching and laser ablation processes can effectively get rid of surface contaminations but these processes cannot reduce the surface roughness.