Calculation of backward flow in channels with moving walls in oil free non-contact vacuum pumps

摘要

Procedure of conductance calculation of radial channels formed by moving walls in non-contact pumps and compressors in viscous gas flow regime is developed. Comparison of calculated data and data obtained by numerical solution of gas flow is carried out for inlet pressures from 100 to 10~5 Pa and wall velocities 5-40 m/s. Formula for approximate conductance calculation of channels with moving walls used as the initial approximation in the presented procedure is obtained for faster calculation.