The Study of TiCN Coating Based on Vacuum arc ion Plating and its Performance

摘要

This article provides an overview of the basic properties of the TiCN hard film, preparation methods, influencing factors, and application development trend. Magnetron sputter ion plating, radiofrequency sputtering method and multi-arc ion plating three coating preparation techniques are introduced. In this paper, with the coating by multi-arc ion plating method as the study object, an overview of the impact of C and N flow to its structure, as well as temperature, coating thickness, the pulse bias, the arc current to its performance is provided. Compared to other hard coatings, the improvement in its performance is showed and the future direction of technology development of TiCN is briefly discussed.